The UV-LED curing system UF-300 is a highly specialized and automated device for highest demands on precision, repeatability and production quality of UV tape curing. The device can expose commercially available UV tapes from leading manufacturers on up to 300mm wafers with a throughput of 360 wafers per hour. Usual exposure durations are achieved within 0.5-2.5s. To ensure a homogeneous energy distribution of +-5% over the entire surface, the individual LED modules are controlled by electronic drivers. The exposure dose recommended by the film manufacturer can be entered in mJ/cm² via the touch display. With the optional SW functionality and UV integrator it is possible to retrieve log files of the UV curing, store favorite recipes and correct any LED deterioration over the life time of the LED array.

We customize the device to be equip with LED’s of different wave length such as 405nm or 385nm or to control it via an API. It is also possible to exceed the maximal dose by water cooling or to customize the UF-300 as an integrated module into larger semiconductor fabrication machines.

The device does not need any specific installation except the connection to the nitrogen valve. The low operating costs, small footprint and high quality of the final results make the UF-300 an internationally successful product in the cleanroom applications of well-known large corporations.

Unlike conventional mercury vapor lamp systems, the unit is ready for use immediately after being switched on. Notably, the LED exposure with an average wavelength of 365nm produces neither harmful ozone nor dangerous mercury gas.

Process Overview

The mounted wafer and frame are placed manually onto the protective glass above the LED array with the tape facing down. Once the protection cover is closed, which is monitored by redundancy of switches, the process is started by pressing the start button on the 10″ display. Previously it is possible to adjust a variety of parameters such as dose (mJ/mm²), intensity (mW/mm²) or duration (s). Guidance is provided on the 10″ display. Once the process is finished, the cover can be opened and the substrate retrieved.

Functionality of the Software Package Option

• Access to journal with the following information: date, time, type of recipe (favorite), dose, intensity, duration, N2 applied (Y/N), and number or repetitions
• Create favorites with reoccurring recipes
• Upload and download information from journal or favorites
• Guided, automatic calibration and correction of LED deterioration with an additional UV integrator. The UV integrator comes together with the software option